Detection device, electronic apparatus, and robot

ABSTRACT

A first substrate that includes pressure sensors which are disposed in plural around a reference point; an approximately hemispherical elastic protrusion that is positioned so that the center of the elastic protrusion is approximately disposed in a position which is overlapped with the reference point, and is elastically deformed by an external force; and a second substrate that is separated from the elastic protrusion and installed on a side which is opposite to the first substrate are provided. When the external force is applied, a predetermined calculation is performed by using a pressure value which is detected through each pressure sensor, and the direction and the intensity of the applied external force are obtained.

This application is a divisional of application Ser. No. 13/240,244 (nowU.S. Pat. No. 8,707,802), filed Sep. 22, 2011, which claims priority toJapan Patent Application No. 2010-237153 filed Oct. 22, 2010, the entiredisclosures of which are hereby incorporated by reference in theirentireties.

BACKGROUND

1. Technical Field

The present invention relates to a detection device, an electronicapparatus, and a robot.

2. Related Art

As a device that detects an external force, detection devices asdescribed in JP-A-2008-164557, JP-A-2007-187502, and Japanese patent No.4364146 are known. It has been considered to apply the detection devicesto a tactile sensor or the like of a touch panel or a robot.

In the detection device of JP-A-2008-164557, a plurality of contacts,which includes a bulged portion, is installed on a surface of apressure-sensitive element. In addition, the pressure distribution andthe pressure in a horizontal direction are detected from a load appliedto each contact or a movement of each contact. However, in the detectiondevice of JP-A-2008-164557, since the contact is exposed, for example,when an external pressure is applied to a region between two adjacentcontacts, the two adjacent contacts are inclined in directions oppositeto each other. That is, a detection error occurs such as detecting thedirection opposite to the direction in which the external pressure isapplied. Therefore, the external pressure which is applied to thedetection device cannot be appropriately detected.

In the detection device of JP-A-2007-187502, a spherical orhemispherical elastic body in which a tip portion thereof faces apressure-sensitive element side is installed on a surface of thepressure-sensitive element. In addition, the intensity and the directionof an external pressure are detected from a deformation of the elasticbody and a variation in a position of the center of gravity of theelastic body. However, in the detection device of JP-A-2007-187502,since the elastic body and the pressure-sensitive element are not bondedto each other, for example, when the external pressure in a horizontaldirection is applied to the elastic body, the center of gravity of theelastic body and a reference position of the pressure-sensitive elementare deviated from each other and do not return to the original position.In a state where the deviation between the center of gravity of theelastic body and the reference position of the pressure-sensitiveelement remains, there is a problem in that the intensity of theexternal pressure in the horizontal direction cannot be appropriatelymeasured.

In the detection device of Japanese patent No. 4364146, a columnar bodyand a pressure-receiving sheet are installed on a surface of apressure-sensitive element, and the columnar body and thepressure-receiving sheet are bonded to each other. Therefore, when theexternal pressure is applied to the pressure-receiving sheet, stress isconcentrated in the bonded portion between the pressure-receiving sheetand the columnar body. Thus, there are problems in that the bondedsurface between the columnar body and the pressure-receiving sheet iseasily collapsed and the durability is deteriorated.

SUMMARY Application 1

According to an aspect of the invention, there is provided a detectiondevice including: a first substrate that includes pressure sensors whichare disposed in plurality around a reference point; an elasticprotrusion that is positioned so that the center of gravity of theelastic protrusion is disposed in a position which is overlapped withthe reference point, and is elastically deformed by an externalpressure; and a second substrate that is separated from the elasticprotrusion and installed on a side which is opposite to the firstsubstrate, wherein the elastic protrusion is formed on the firstsubstrate so that a tip portion of the elastic protrusion makes contactwith the second substrate, and a direction and a intensity of anexternal pressure, which is applied from the second substrate side, aredetected in a state where the tip portion of the elastic protrusionmakes contact with the second substrate.

According the detection device of the aspect of the invention, when theexternal pressure is applied to a surface of the second substrate, theelastic protrusion is compressively deformed. At this time, when asliding force component in a predetermined direction in the surface (aforce component in a direction which is parallel to a surface of thepressure sensor) exists, the center of gravity of the elastic protrusionis deviated from the reference point and moved to a predetermineddirection (the sliding direction). Therefore, among the plurality ofpressure sensors, a relatively great pressure value is detected at thepressure sensor which is disposed in the position which is overlappedwith the center of gravity of the elastic protrusion, and a relativelysmall pressure value is detected at the pressure sensor which isdisposed in the position which is not overlapped with the center ofgravity of the elastic protrusion. Thus, a difference between thepressure values, which are detected by the pressure sensors, iscalculated, and the direction and the intensity in which the externalpressure is applied can be obtained based on the difference.

Therefore, it is possible to provide the detection device having animproved durability and capable of detecting the direction and theintensity in which an external pressure is applied with high accuracy.

Application 2

In the detection device of the aspect of the invention, the detectiondevice may further include a calculation device, the calculation devicecalculates a difference between pressure values detected by the pressuresensors which are arbitrarily combined, among pressure values which aredetected by the plurality of pressure sensors due to the fact that theelastic protrusion is elastically deformed by the external pressure, andcalculates the direction and the intensity of the applied externalpressure based on the difference.

Application 3

In the detection device of the aspect of the invention, the elasticprotrusion may be formed of a resin material having a predeterminedhardness, and may be hemispherical.

In the approximately hemispherical elastic protrusion, since a tipportion thereof faces the second substrate and is disposed in the firstsubstrate, even in a state where the sliding force is applied to theelastic protrusion, it is difficult to generate the deviation of thehorizontal position of the contact surface of the elastic protrusion,which comes into contact with the first substrate. Therefore, after thesliding force is applied and the center of gravity and the referenceposition of the elastic body are deviated from each other, even in astate where the sliding force is not applied, it is possible to decreasea residual of the deviation between the center of gravity of the elasticprotrusion and the reference position, or prevent the deviation fromremaining.

In addition, since the tip of the approximately hemispherical elasticprotrusion, which is disposed so as to face the second substrate, is acurved surface, when the external force is applied to the secondsubstrate, a stress concentration in a certain portion of the elasticprotrusion can be suppressed, and the durability can be improved.

Application 4

In the detection device of the aspect of the invention, the plurality ofpressure sensors may be disposed to be point symmetrical with respect tothe reference point.

According to the detection device of the aspect of the invention, sincethe distances between the reference point and the pressure sensors arethe same as each other, the relationship between variations in positionsof the center of gravity of the elastic protrusion and the pressurevalues detected by the pressure sensors becomes the same as each other.

For example, when the plurality of pressure sensors is disposed atdistances which are different to each other from the reference point,even though variations in the positions of the center of gravity of theelastic protrusion are the same as each other, the pressure values,which are detected by the pressure sensors, are different to each other.Therefore, when the difference between the detection values iscalculated, a correction factor is necessary according to thedisposition position of each pressure sensor.

However, according to the configuration of the aspect of the invention,since the relationship between variations in the positions of the centerof gravity of the elastic protrusion and the pressure values which aredetected by the pressure sensors becomes the same as each other, thecorrection factor is not necessary. Therefore, the direction and theintensity of the external pressure are easily calculated from thepressure value which is detected by each pressure sensor, and theexternal pressure can be efficiently detected.

Application 5

In the detection device of the aspect of the invention, the plurality ofpressure sensors may be disposed in two directions which cross eachother.

According to the detection device of the aspect of the invention, thedirection and the intensity of the external pressure can be easilycalculated from the difference between the pressure values of thepressure sensors which are arbitrarily combined, among the pressurevalues of the pressure sensors.

Application 6

In the detection device of the aspect of the invention, the plurality ofpressure sensors may be disposed in at least 4 rows×4 columns in the twodirections which cross each other.

According to the detection device of the aspect of the invention, thenumber of the pressure sensors disposed is increased. Thus, thedetection result of each pressure sensor is integrated based on thepressure values which are detected by the plurality of pressure sensors,and it is possible to determine the direction in which the externalpressure is applied. Therefore, the direction of the external pressurecan be detected with high accuracy.

Application 7

In the detection device of the aspect of the invention, the elasticprotrusion may be formed in plurality in the first substrate, theplurality of elastic protrusions is separated from each other anddisposed, and the second substrate may be disposed over the plurality ofelastic protrusions.

According to the detection device of the aspect of the invention,variations in a parallel direction in the surface of the secondsubstrate can be allowed when the elastic protrusion is elasticallydeformed. For example, when one elastic protrusion is deformed, aninfluence of the deformation in the other one elastic protrusion can besuppressed. Therefore, compared to the case where each of the pluralityof elastic protrusions is disposed making contact with each other, theexternal pressure can be more correctly transferred to each pressuresensor. Thus, the direction and the intensity of the external pressurecan be detected with high accuracy.

Application 8

In the detection device of the aspect of the invention, stiffness of thesecond substrate may be greater than that of the elastic protrusion.

According to the detection device of the aspect of the invention, forexample, when the external force is applied to a region between twoadjacent elastic protrusions, the two adjacent elastic protrusions canbe suppressed to be compressively deformed in the directions which areopposite to each other. That is, a detection error such as detecting thedirection opposite to the direction to which the external pressure isapplied can be suppressed. Therefore, the direction of the externalpressure can be detected with high accuracy.

Application 9

According to another aspect of the invention, there is provided anelectronic apparatus including the above-described detection devices.

According to the electronic apparatus of the aspect of the invention,since the electronic apparatus includes the above-described detectiondevices, it is possible to provide an electronic apparatus capable ofdetecting the direction and the intensity of the external pressure withhigh accuracy.

Application 10

According to still another aspect of the invention, there is provided arobot including the above-described detection devices.

According to the robot of the aspect of the invention, since the robotincludes the above-described detection devices, it is possible toprovide a robot capable of detecting the direction and the intensity ofthe external pressure with high accuracy.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be described with reference to the accompanyingdrawings, wherein like numbers reference like elements.

FIG. 1 is an exploded perspective view showing a schematic configurationof a detection device according to a first embodiment of the invention.

FIGS. 2A to 2C are cross-sectional views showing variations in pressurevalues through pressure sensors according to the first embodiment.

FIGS. 3A to 3C are plan views showing variations in pressure valuesthrough pressure sensors according to the first embodiment.

FIG. 4 is an exemplary view showing a calculation device whichcalculates an external pressure.

FIG. 5 is a diagram showing a coordinate system of a sensing regionaccording to the first embodiment.

FIG. 6 is a diagram showing a pressure distribution in a verticaldirection through the pressure sensor according to the first embodiment.

FIG. 7 is a diagram showing a calculation example in a sliding directionthrough the pressure sensor according to the first embodiment.

FIG. 8 is an exploded perspective view showing a schematic configurationof a detection device according to a second embodiment of the invention.

FIGS. 9A to 9C are cross-sectional views showing variations in pressurevalues through pressure sensors according to a second embodiment.

FIGS. 10A to 10 c are plan views showing the variations in the pressurevalues through the pressure sensors according to the second embodiment.

FIG. 11 is a diagram showing a coordinate system of a sensing regionaccording to the second embodiment.

FIG. 12 is a cross-sectional view showing a schematic configuration of adetection device according to a third embodiment.

FIG. 13 is a cross-sectional view showing a schematic configuration of adetection device according to a fourth embodiment.

FIG. 14 is a schematic view showing a schematic configuration of acellular phone as an example of an electronic apparatus.

FIG. 15 is a schematic view showing a schematic configuration of apersonal digital assistant as an example of an electronic apparatus.

FIGS. 16A and 16B are schematic views showing a schematic configurationof a robot hand as an example of a robot.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

Hereinafter, embodiments of the invention will be described reference tothe accompanying drawings. The embodiments each describe one aspect ofthe invention and do not limit the invention. Therefore, the inventioncan be arbitrarily modified within a scope of the technical idea of theinvention. In addition, in the drawings below, for the sake of ease ofunderstanding of each component, the scale and the number or the likebetween the real configuration and each configuration described in thedrawings may be different to each other.

Moreover, in the embodiments, a “surface” of a first substrate indicatesa formation surface of a plurality of pressure sensors of a firstsubstrate main body. In addition, a “surface” of a second substrateindicates a surface of a second substrate main body which is opposite toa formation surface of an elastic protrusion, that is, a surface whichreceives an external pressure.

In the description below, an XYZ orthogonal coordinate system is set inthe drawings, and each member will be described reference to the XYZorthogonal coordinate system. In the XYZ orthogonal coordinate system,an X axis and a Y axis are set in a tangential direction of the surfaceof the first substrate 10, and a Z axis is set in a normal direction ofthe surface of the first substrate 10.

First Embodiment

Detection Device

FIG. 1 is an exploded perspective view showing a schematic configurationof a detection device according to a first embodiment of the invention.In FIG. 1, a reference number P indicates a reference point, and areference number S indicates a unit detection region that is detected bya plurality of pressure sensors 12 which are disposed corresponding toone elastic protrusion 21.

A detection device 1 is a pressure sensor type touch pad that detectsthe direction and the intensity of the external pressure which isapplied to the reference point. For example, the detection device 1 is apointing device which is used instead of a mouse in an electronicapparatus such as a notebook computer. In addition, the “reference pointP” is a point in which a center of the elastic protrusion 21 is disposedwhen a sliding force is not applied.

As shown in FIG. 1, the detection device 1 includes: the first substrate10 that includes pressure sensors 12 which are disposed in pluralityaround the reference point P; an approximately hemispherical elasticprotrusion 21 that is positioned so that the center of the elasticprotrusion is approximately disposed in a position which is overlappedwith the reference point P, and is elastically deformed by an externalpressure; and a second substrate 30 that is separated from the elasticprotrusion 21 and installed on a side which is opposite to the firstsubstrate 10.

The detection device 1 includes a calculation device 120 (refer to FIG.4), and the calculation device 120 calculates a difference betweenpressure values detected by the pressure sensors 12 which arearbitrarily combined, among pressure values which are detected by theplurality of pressure sensors 12 due to the fact that the elasticprotrusion 21 is elastically deformed by the external pressure, andcalculates the applied external pressure based on the difference.

The first substrate 10 includes a first substrate main body 11 that isformed in a rectangular plate shape and formed of materials such asglass, quartz, or plastic; and the plurality of pressure sensors 12 thatis disposed in the first substrate main body 11. For example, the sizeof the first substrate main body 11 (size in planar view) is about 56 mmlength×56 mm width.

The plurality of pressure sensors 12 is disposed to be point symmetricalwith respect to the reference point P. For example, the plurality ofpressure sensors 12 is disposed in a matrix state in two directions (theX direction and the Y direction) which are perpendicular to each other.Thereby, since distances between the reference point P and the pressuresensors 12 are the same as each other, the relationship betweenvariations in the positions of the center of gravity of the elasticprotrusion 21 and the pressure values detected by the pressure sensors12 is the same as each other. Thus, the difference between the pressurevalues that are detected by the pressure sensors which are arbitrarilycombined among pressure values of the pressure sensors 12 is easilycalculated. In addition, the calculation method of the difference of thepressure values will be described hereinafter.

The interval between adjacent pressure sensors 12 is about 0.1 mm.Thereby, noise due to influence such as a disturbance or staticelectricity is not carried on the pressure values which are detected bythe pressure sensors 12 disposed in adjacent positions.

The plurality of pressure sensors 12 is disposed 4 in total with 2 rowsin length×2 columns in width per unit detection region S. A center offour pressure sensors 12 (a center of the unit detection region S)becomes the reference point P. For example, the size of the unitdetection region S (the size in planar view) is about 2.8 mm length×2.8mm width. In addition, each area of the four pressure sensors 12 becomessubstantially the same. As the pressure sensor 12, for example, apressure-sensitive element such as a diaphragm gauge may be used. Thepressure sensor 12 converts a pressure, which is applied to thediaphragm when the external pressure is applied to a contact surface, toan electrical signal.

The elastic protrusion 21 is disposed in a matrix state in the Xdirection and the Y direction on the first substrate 10. For example,the elastic protrusion 21 is formed of resin materials such as aurethane foam resin or a silicone resin. In addition, for example, thetip of the elastic protrusion 21 becomes hemispherical in a sphericalsurface, and makes contact with the second substrate 30.

The second substrate 30 is formed of materials such as glass, quartz, orplastic. In addition, the shape of the elastic protrusion 21 may behemispherical, and conical or columnar.

The elastic protrusion 21 is formed in plurality in the first substrate10. In addition, the plurality of elastic protrusions 21 is separatedfrom each other and disposed, and the second substrate 30 is disposedover the plurality of elastic protrusions 21. Therefore, when theelastic protrusions 21 are elastically deformed, variations in aparallel direction in the surface of the second substrate 30 can beallowed.

The size of the elastic protrusion 21 can be arbitrarily set. Here, adiameter of a base portion of the elastic protrusion 21 (a diameter of aportion in which the elastic protrusion 21 makes contact with the firstsubstrate 10) is about 2 mm. A height of the elastic protrusion 21 (adistance in the Z direction of the elastic protrusion 21) is about 1.5mm. A separation interval between adjacent elastic protrusions 21 isabout 1 mm. Durometer hardness of the elastic protrusion 21 (a hardnessmeasurement value measured by ISO7619 Standard Durometer, type A) isabout 30.

A detection method of the direction and the intensity of an externalpressure applied to the reference point P will be described withreference to FIGS. 2 and 3. FIGS. 2A to 2C are cross-sectional viewsshowing variations in pressure values through pressure sensors accordingto the first embodiment. FIGS. 3A to 3C are plan views which correspondto FIGS. 2A to 2C and show variations in pressure values through thepressure sensors according to the first embodiment.

In addition, FIGS. 2A and 3A show states (when the external pressure isnot applied) before the external pressure is applied to the surface ofthe second substrate 30.

FIGS. 2B and 3B show states (states where a sliding force is notapplied) where the external pressure in a vertical direction is appliedto the surface of the second substrate 30. FIGS. 2C and 3C show states(states where the sliding force is applied) where the external pressurein an inclined direction is applied to the surface of the secondsubstrate 30.In addition, in FIGS. 3A to 3C, a reference number G indicates thecenter of gravity (a center of pressure) of the elastic protrusion 21.

As shown in FIGS. 2A and 3A, before the external pressure is applied tothe surface of the second substrate 30, the elastic protrusion 21 is notdeformed. Thereby, the distance between the first substrate 10 and thesecond substrate 30 is maintained to be constant. At this time, thecenter of gravity G of the elastic protrusion 21 is disposed at aposition which is overlapped with the reference point P. The pressurevalue of each pressure sensor 12 at this time is stored on a data memory124 (refer to FIG. 4) of the calculation device 120. The direction andthe intensity in which the external pressure is applied are obtainedbased on the pressure value of each pressure sensor 12 which is storedon the data memory 124.

As shown in FIGS. 2B and 3B, when the external pressure in the verticaldirection is applied to the surface of the second substrate 30, theelastic protrusion 21 is compressively deformed in the Z direction.Thereby, the second substrate 30 is bent toward the −Z direction, andthe distance between the first substrate 10 and the second substrate 30is smaller compared to the one of that the external pressure is notapplied. At this time, the pressure value of the pressure sensor 12 isgreater compared to the one of that the external pressure is notapplied. In addition, the variation is substantially the same as eachpressure sensor 12.

As shown in FIGS. 2C and 3C, when the external pressure in the inclineddirection is applied to the surface of the second substrate 30, theelastic protrusion 21 is inclined and compressively deformed. Thereby,the second substrate 20 is bent in the −Z direction, and the distancebetween the first substrate 10 and the second substrate 30 is smaller ascompared to the one of that the external pressure is not applied. Atthis time, the center of gravity G of the elastic protrusion 21 isdeviated from the reference point P to the +X direction and the +Ydirection. In this case, the pressure values in which the elasticprotrusion 21 is applied to the four pressure sensors 12 are differentfrom each other. Specifically, in the pressure values in which theelastic protrusion 21 is applied to four pressure sensors 12, thepressure value that is applied to the pressure sensor 12 disposed in the+X direction and the +Y direction is greater than the pressure valuethat is applied to the pressure sensor 12 disposed in the −X directionand −Y direction among four pressure sensors 12.

The deviation in the deformation of the elastic protrusion 21 occurs dueto the external pressure in the inclination direction. That is, thecenter of gravity G of the elastic protrusion 21 is deviated from thereference point P, and moved in the sliding direction (the +X directionand the +Y direction). Thereby, different pressure values are detectedby pressure sensors 12. Specifically, a relatively great pressure valueis detected at the pressure sensor 12 disposed in a position which isoverlapped with the center of gravity G of the elastic protrusion 21,and a relatively small pressure value is detected at the pressure sensor12 disposed in a position which is not overlapped with the center ofgravity G of the elastic protrusion 21. In addition, as describedhereinafter, the direction and the intensity in which the externalpressure is applied is obtained based on the calculation method of thedifference.

FIG. 4 shows an example of a calculation device which calculates theexternal pressure. The calculation device 120 includes an interfaceportion (I/O portion) 121 that sends and receives a signal and outputsthe calculation result; a CPU 122 that performs various calculations; aprogram memory 123; and a data memory 124 that stores data.

The calculation device 120 calculates the difference between pressurevalues detected by pressure sensors 12 (112) which are arbitrarilycombined, among pressure values which are detected by the plurality ofpressure sensors 12 (112) due to the fact that the elastic protrusion 21is elastically deformed by the external pressure. Thereafter, thecalculation device 120 performs a calculation processing whichcalculates the direction and the intensity of the applied externalpressure based on the difference.

FIG. 5 is a diagram showing a coordinate system of a sensing regionaccording to the first embodiment. FIG. 6 is a diagram showing apressure distribution in a vertical direction through the pressuresensor according to the first embodiment. FIG. 7 is a diagram showing acalculation example in a sliding direction through the pressure sensoraccording to the first embodiment.

As shown in FIG. 5, the plurality of pressure sensors S1 to S4 aredisposed 4 in total with 2 rows in length×2 columns in width per unitdetection region S. Here, the pressure values (the detection values)detected by pressure sensors S1 to S4 are given as P_(S1), P_(S2),P_(S3), and P_(S4), and the component Fx in the X direction of theexternal force (a ratio of the component of the force applied in the Xdirection to the direction components in the surface to which theexternal force is applied) is expressed by equation 1 below.

In addition, the component Fy in the Y direction of the external force(a ratio of the component of the force applied in the Y direction to thedirection components in the surface to which the external force isapplied) is expressed by equation 2 below.

Moreover, the component Fz in the Z direction of the external force (acomponent in the vertical direction of the external force, and the zaxis are omitted in FIG. 3) is expressed by equation 3 below.

$\begin{matrix}{F_{x} = \frac{\left( {P_{S\; 2} + P_{S\; 4}} \right) - \left( {P_{S\; 1} + P_{S\; 3}} \right)}{P_{S\; 1} + P_{S\; 2} + P_{S\; 3} + P_{S\; 4}}} & (1) \\{F_{y} = \frac{\left( {P_{S\; 1} + P_{S\; 2}} \right) - \left( {P_{S\; 3} + P_{S\; 4}} \right)}{P_{S\; 1} + P_{S\; 2} + P_{S\; 3} + P_{S\; 4}}} & (2) \\{F_{z} = {P_{S\; 1} + P_{S\; 2} + P_{S\; 3} + P_{S\; 4}}} & (3)\end{matrix}$

In the embodiment, the difference between pressure values arecalculated, the pressure values are detected by the arbitrarily combinedpressure sensors, among the pressure values which are detected by fourpressure sensors S1 to S4 due to the fact that the elastic protrusion 21is elastically deformed by the external pressure, and the direction inwhich the external pressure is applied is calculated based on thedifference.

As shown in the equation 1, in the component Fx in the X direction ofthe external pressure, among the pressure values which are detected byfour pressure sensors S1 to S4, pressure values which are detected bythe pressure sensor S2 and the pressure sensor S4 disposed in the +Xdirection are combined, and pressure values which are detected by thepressure sensor S1 and the pressure sensor S3 disposed in the −Xdirection are combined. In this manner, the component in the X directionof the external pressure is obtained based on the difference betweenpressure value through the combination of the pressure sensor S2 and thepressure sensor S4 disposed in the +X direction and pressure valuethrough the combination of the pressure sensor S1 and the pressuresensor S3 disposed in the −X direction.

As shown in the equation 2, in the component Fy in the Y direction ofthe external pressure, among the pressure values which are detected byfour pressure sensors S1 to S4, pressure values which are detected bythe pressure sensor S1 and the pressure sensor S2 disposed in the +Ydirection are combined, and pressure values which are detected by thepressure sensor S3 and the pressure sensor S4 disposed in the −Ydirection are combined. In this manner, the component in the Y directionof the external pressure is obtained based on the difference betweenpressure value of the combination of the pressure sensor S1 and thepressure sensor S2 disposed in the +Y direction and pressure valuethrough the combination of the pressure sensor S3 and the pressuresensor S4 disposed in the −Y direction.

As shown in the equation 3, the component Fz in the Z direction of theexternal pressure is obtained from a resultant force which sums thepressure values of four pressure sensors S1 to S4. However, thedetection value of the component Fz in the Z direction of the externalpressure tends to be more greatly detected compared to those of thecomponent Fx in the X direction of the external pressure and thecomponent Fy (components of the force) in the Y direction of theexternal pressure.

For example, if the elastic protrusion 21 is formed of hard materials, adetection sensitivity of the component Fz in the Z direction of theexternal pressure is increased. However, the elastic protrusion 21 isnot easily deformed, and the detection values in the directions (thecomponent Fx in the X direction and the component Fy in the Y directionof the external pressure) in the surface of the external pressure aredecreased. For example, if an aspect ratio of the elastic protrusion 21is decreased, the elastic protrusion 21 is difficult to be deformed, andthe detection values in the directions in the surface to which theexternal pressure is applied are decreased.

Thereby, in order to match the detection value of the component Fz inthe Z direction of the external pressure with the detection values ofthe component Fx in the X direction of the external pressure and thecomponent Fy in the Y direction of external pressure, the detectionvalues are necessary to be appropriately corrected by a correctionfactor which is determined by the material and the shape of the elasticprotrusion 21.

As shown in FIG. 6, there is considered a case where the position at thetop-left from the center portion of the detection surface of a touch padis obliquely pressed by a finger. At this time, the pressure in thevertical direction of the external pressure is the greatest in thecenter portion of the regions to which the external pressure is applied(the output voltage of the pressure sensor is about 90 to 120 mV). Inaddition, the pressure in the vertical direction of the externalpressure decreases in order in regions from the intermediate peripheryof the center portion (about 60 to 90 mv) to the outermost periphery(about 30 to 60 mV). Moreover, in the region which is not pressed by thefinger, the output voltage of the pressure sensor is about 0 to 30 mV.Further, in the touch pad, the unit detection region (the region inwhich 4 pressure sensors S1 to S4 are disposed in total with 2 rows inlength×2 columns in width) is disposed in a matrix state (for example,225 in total with 15 rows in length×15 columns in width).

As shown in FIG. 7, there is considered a calculation method of thedirection component (the sliding direction) in the surface to which theexternal pressure is applied in the case where the position at thetop-left from the center portion of the detection surface of the touchpad is obliquely pressed by a finger. Those shown in the far left inFIG. 7 indicate an aggregation of nine unit detection regions S, and theexpressed values each indicate the values which sum potential valuesconverted from the pressures in which the pressure sensors 12 detect ineach unit detection region S. In addition, those shown in the center ofFIG. 7 indicate the potential values which are converted from pressuresdetected by pressure sensors 12 for each unit detection region S, andthose shown in the far right indicate the component Fx in the Xdirection and the component Fy in the Y direction of the externalpressure which is calculated for each unit detection region S. At thistime, it is assumed that the pressing force of the finger (the externalforce) is applied to the portions which are disposed in 3 rows inlength×3 columns in width among portions which are disposed 15 rows inlength×15 columns in width. Here, in the pressure in the verticaldirection of the external pressure, similarly to FIG. 6, the pressure ofthe center portion of the region to which the external pressure isapplied is the greatest (110 mV).

Each of unit detection regions S, which are disposed in 3 rows inlength×3 columns in width to which the pressing force of the finger isapplied, includes four pressure sensors S1 to S4. In addition, thedifference between the pressure values are calculated, which aredetected by the pressure sensors 12 which are arbitrarily combined amongpressure values detected by the pressure sensors S1 to S4, and thedirection to which the external pressure applied is calculated based onthe difference.

That is, in each unit detection region S, the component Fx in the Xdirection of the external pressure and the component Fy in the Ydirection of the external pressure are calculated based on the equation1 and the equation 2. Here, that the external pressure is applied in thedirection of about 123° in a counterclockwise direction based on the +Xdirection is understood.

In addition, in the calculation with respect to the direction to whichthe external pressure is applied, a method which obtains by an averagevalue of nine calculation results, or a method which obtains by amaximum values (for example, the detection value which is greater than apredetermined threshold value) among the nine calculation results can beused.

According to the detection device 1 of the embodiment, if the externalpressure applied to the surface of the second substrate 30, the elasticprotrusion 21 is elastically deformed. At this time, when there existsthe component of the sliding force (the component of the force in thedirection parallel to the surface of the pressure sensor 12) in apredetermined direction on the surface, the center of gravity G of theelastic protrusion 21 is deviated from the reference point P and movedin a predetermined direction (the sliding direction). Then, among theplurality of pressure sensors 12, a relatively great pressure value isdetected at the pressure sensor 12 which is disposed in the positionwhich is overlapped with the center of gravity G of the elasticprotrusion 21, and a relatively small pressure value is detected at thepressure sensor 12 which is disposed in the position which is notoverlapped with the center of gravity G of the elastic protrusion 21.

Therefore, the difference between the pressure values detected by thepressure sensors S1 to S4 is calculated, and the direction and theintensity in which the external pressure is applied can be obtainedbased on the difference. In addition, since the tip portion of theapproximately hemispherical elastic protrusion 21 faces the secondsubstrate 30 and is installed in the first substrate 10, even in thestate where the sliding force is applied, the horizontal position of thecontact surface of the elastic protrusion 21, which comes into contactwith the first substrate 10, is not easily deviated. Therefore, afterthe center of gravity G of the elastic protrusion 21 to which thesliding force is applied and the reference position P are deviated fromeach other, even in the state where the sliding force is not applied, itis possible to decrease a residual of the deviation between the centerof gravity G of the elastic protrusion 21 and the reference position P,or to prevent the deviation from remaining.

In addition, since the tip of the approximately hemispherical elasticprotrusion 21, which is disposed so as to face the second substrate 30,is a curved surface, when the external force is applied to the secondsubstrate 30, a stress concentration in a certain portion of the elasticprotrusion 21 can be suppressed, and the durability can be improved.Therefore, it is possible to provide the detection device 1 having animproved durability and capable of detecting the direction and theintensity in which an external pressure is applied with high accuracy.

According to the configuration of the embodiment, since the distancesbetween the reference point P and the pressure sensors S1 to S4 are thesame as each other, the relationship between variations in the positionsof the center of gravity G of the elastic protrusion 21 and the pressurevalues detected by the pressure sensors S1 to S4 becomes the same aseach other. For example, when the plurality of pressure sensors 12 isdisposed at the distances which are different to each other from thereference point P, even though variations of the center of gravity G ofthe elastic protrusion 21 are the same as each other, the pressurevalues, which are detected by pressure sensors 12, are different to eachother. Thereby, the correction factor is necessary according to thedisposition position of each pressure sensor 12 when the differencebetween the detection values is calculated.

However, according to the configuration of the embodiment, since therelationship between variations in the positions of the center ofgravity G of the elastic protrusion 21 and the pressure values detectedby the pressure sensors S1 to S4 is the same as each other, thecorrection factor is not necessary. Therefore, it is possible to easilycalculate the direction and the intensity of the external pressure fromthe pressure values which are detected by the pressure sensors S1 to S4,and the external pressure can be effectively detected.

According to the configuration of the embodiment, since the plurality ofpressure sensors 12 is disposed in a matrix state in two directionswhich are perpendicular to each other, it is possible to easilycalculate the difference between the pressure values detected by thepressure sensors 12 which are arbitrarily combined among the pressurevalues detected by the pressure sensors S1 to S4.

For example, when the component Fx in the X direction among thedirection components in the surface is calculated, compared to the oneof that the plurality of pressure sensors 12 is arbitrarily disposed ina plurality of directions, the combination between the pressure sensorS2 and the pressure sensor S4 which are disposed relatively in the Xdirection and the combination between the pressure sensor S1 and thepressure sensor S3 which are disposed relatively in the −X direction areclassified to each other and easily selected. Therefore, the externalpressure can be effectively detected.

According to the configuration of the embodiment, the plurality ofelastic protrusions 21 is separated from each other and disposed, andthe second substrate 30 is disposed over the plurality of elasticprotrusions 21. Therefore, when the elastic protrusions 21 areelastically deformed, variations in the parallel direction in thesurface of the second substrate 30 can be allowed. For example, when oneelastic protrusion 21 is deformed, an influence of the deformation inthe other one elastic protrusion 21 can be suppressed. Thereby, theexternal pressure can be more correctly transferred to each of thepressure sensors S1 to S4 compared to the case where each of theplurality of elastic protrusions 21 comes into contact with each otherand is disposed. Therefore, the direction and the intensity of theexternal pressure can be detected with high accuracy.

In addition, the embodiment describes an example in which the pressuresensors 12 are disposed 4 in total with 2 rows in length×2 columns inwidth per unit detection region S. However, the invention is not limitedthereto. The pressure sensors 12 may be disposed equal to or more than 3per unit detection region S.

Second Embodiment

FIG. 8 is an exploded perspective view which corresponds to FIG. 1 andshows a schematic configuration of a detection device according to asecond embodiment of the invention. In FIG. 8, the same referencenumbers are denoted with respect to the same components as FIG. 1, andthe detailed description thereof is omitted. In FIG. 8, the referencenumber P indicates the reference point, and the reference number Sindicates the unit detection region in which the plurality of pressuresensors 112, which is disposed corresponding to one elastic protrusion21, detects.

The detection device 2 of the second embodiment is different to thedetection device 1 described in the first embodiment in that theplurality of pressure sensors 112 is disposed in at least 4 rows inlength×4 columns in width in two directions which are perpendicular toeach other. In addition, in FIG. 8, for convenience, the plurality ofpressure sensors 112 is disposed in 4 rows in length×4 columns in widthper the unit detection region S. However, in practice, as shown in FIGS.9 and 10, the plurality of pressure sensors 112 may be disposed equal toor more than 4 rows in length×4 columns in width per unit detectionregion S.

As shown in FIG. 8, the detection device 2 includes a first substrate110 that has pressure sensors 112 which are disposed in plurality aroundthe reference point P; an approximately hemispherical elastic protrusion21 that is positioned so that the center of the elastic protrusion isapproximately disposed in a position which is overlapped with thereference point P, and is elastically deformed by an external pressure;and a second substrate 30 that is separated from the elastic protrusion21 and installed on a side which is opposite to the first substrate 110.

FIGS. 9A to 9C are cross-sectional views which are corresponding toFIGS. 2A to 2C and show variations in pressure values through pressuresensors according to the second embodiment. FIGS. 10A to 10 c are planviews which are corresponding to FIGS. 9A to 9C and show the variationsin the pressure values through the pressure sensors according to thesecond embodiment.

In addition, FIGS. 9A and 10A show states (when the external pressure isnot applied) before the external pressure is applied to the surface ofthe second substrate 30. FIGS. 9B and 10B show states where the externalpressure in a vertical direction is applied to the surface of the secondsubstrate 30. FIGS. 9C and 100 show states where the external pressurein an inclined direction is applied to the surface of the secondsubstrate 30. In addition, in FIGS. 10A to 10C, reference number Gindicates the center of gravity of the elastic protrusion 21. In FIGS.9A to 9C and FIGS. 10A to 10C, the same reference numbers are denotedwith respect to the same components as FIGS. 2A to 2C and FIGS. 3A to3C, and the detailed description thereof is omitted.

As shown in FIGS. 9A and 10A, before the external pressure is applied tothe surface of the second substrate 30, the elastic protrusion 21 is notdeformed. Thereby, the distance between the first substrate 110 and thesecond substrate 30 is maintained to be constant. At this time, thecenter of gravity G of the elastic protrusion 21 is disposed at aposition which is overlapped with the reference point P. The pressurevalue of each pressure sensor 112 at this time is stored on a datamemory 124 of FIG. 4. The direction and the intensity in which theexternal pressure is applied are obtained based on the pressure value ofeach pressure sensor 112 which is stored on the data memory 124.

As shown in FIGS. 9B and 10B, when the external pressure in the verticaldirection is applied to the surface of the second substrate 30, theelastic protrusion 21 is compressively deformed in the Z direction.Thereby, the second substrate 30 is bent toward the −Z direction, andthe distance between the first substrate 110 and the second substrate 30is smaller compared to the one of that the external pressure is notapplied. At this time, the pressure value of the pressure sensor 112 isgreater compared to the one of that the external pressure is notapplied.

As shown in FIGS. 9C and 10C, when the external pressure in the inclineddirection is applied to the surface of the second substrate 30, theelastic protrusion 21 is inclined and compressively deformed. Thereby,the second substrate 30 is bent in the −Z direction, and the distancebetween the first substrate 110 and the second substrate 30 is smallercompared to the one of that the external pressure is not applied. Atthis time, the center of gravity G of the elastic protrusion 21 isdeviated from the reference point P to the +X direction and the +Ydirection. In this case, the pressure values in which the elasticprotrusion 21 is applied to the plurality of pressure sensors 112 aredifferent to each other.

Specifically, among the pressures values that the elastic protrusion 21applies to the plurality of pressure sensors 112, the pressure valuethat is applied to the pressure sensor 112 disposed in the +X directionand the +Y direction is greater than the pressure value that is appliedto the pressure sensor 112 disposed in the −X direction and −Ydirection.

FIG. 11 is a diagram which corresponds to FIG. 5 and shows a coordinatesystem of a sensing region according to the second embodiment. Inaddition, in FIG. 11, the plurality of pressure sensors S_(i) (thenumber of which is 100) is disposed in a matrix state, 25 of 100pressure sensors S_(i) are disposed in a region which is partitioned inthe −X direction and the +Y direction, in a region which is partitionedin the +X direction and +Y direction, in a region which is partitionedin the −X direction and −Y direction, and in a region which ispartitioned in the +X direction and the −Y direction, respectively.Moreover, in FIG. 11, for convenience, 100 pressure sensors S_(i) areshown. However, the number of the pressure sensors S_(i) disposed is notlimited thereto, and can be arbitrarily modified.

As shown in FIG. 11, the plurality of pressure sensors S_(i) is disposedin 100 in total with 10 rows in length×10 columns in width per unitdetection region S. Here, the pressure value (the detection value) inwhich each pressure sensors S_(i) detects is given as P_(i) (i=1 to100), the direction component of the distance between the referencepoint P and each pressure sensor S_(i) in the surface is given as r_(i)(i=1 to 100). In addition, when the component in the X direction of thedirection component in the surface is given as r_(xi) (i=1 to 100) andthe component in the Y direction of the direction component in thesurface is given as r_(yi) (i=1 to 100), component Fx in the X directionof the external force (a ratio of the component of the force applied inthe X direction to the direction components in the surface of theexternal force) is expressed by equation 4 below.

In addition, the component Fy in the Y direction of the external force(a ratio of the component of the force applied in the Y direction to thedirection components in the surface of the external force) is expressedby equation 5 below.

Moreover, the component Fz in the Z direction of the external force(component in the vertical direction of the external force) is expressedby equation 6 below.

$\begin{matrix}{F_{x} = \frac{\sum\limits_{i}{P_{i}r_{xi}}}{\sum\limits_{i}P_{i}}} & (4) \\{F_{y} = \frac{\sum\limits_{i}{P_{i}r_{yi}}}{\sum\limits_{i}P_{i}}} & (5) \\{F_{z} = {\sum\limits_{i}P_{i}}} & (6)\end{matrix}$

In the second embodiment, the difference between pressure values arecalculated, the pressure values are detected by the arbitrarily combinedpressure sensors S_(i) among the pressure values of 100 pressure sensorsS_(i) which are varied due to the fact that the elastic protrusion iselastically deformed by the external pressure, and the direction towhich the external pressure is applied is calculated based on thedifference.

As shown in the equation 4, for the component Fx in the X direction ofthe external pressure, among the pressure values which are detected by100 pressure sensors S_(i), values which are detected by the pressuresensor S_(i) disposed relatively in the +X direction are combined, andvalues which are detected by the pressure sensors S_(i) disposedrelatively in the −X direction are combined. In this manner, thecomponent in the X direction of the external pressure is obtained basedon the difference between the pressure value through the combination ofthe pressure sensors S_(i) disposed relatively in the +X direction andthe pressure value through the combination of the pressure sensors S_(i)disposed relatively in the −X direction.

As shown in the equation 5, for the component Fy in the Y direction ofthe external pressure, among the pressure values of 100 pressure sensorsS_(i), values which are detected by the pressure sensor S_(i) disposedrelatively in the +Y direction are combined, and values which aredetected by the pressure sensor S_(i) disposed relatively in the −Ydirection are combined. In this manner, the component in the Y directionof the external pressure is obtained based on the difference between thepressure value through the combination of the pressure sensors S_(i)disposed relatively in the +Y direction and the pressure value throughthe combination of the pressure sensors S_(i) disposed relatively in the−Y direction.

As shown in the equation 6, the component Fz in the Z direction of theexternal pressure is obtained from a resultant force which sums thepressure values detected by 100 pressure sensors S_(i). However, thedetection value of the component Fz in the Z direction of the externalpressure tends to be more greatly detected compared to those of thecomponent Fx in the X direction of the external pressure and thecomponent Fy in the Y direction of the external pressure. Thereby, inorder to match the detection value of the component Fz in the Zdirection of the external pressure with the detection values of thecomponent Fx in the X direction of the external pressure and thecomponent Fy in the Y direction of external pressure, the detectionvalues are necessary to be appropriately corrected by a correctionfactor which is determined by the material and the shape of the elasticprotrusion 21.

In addition, in the calculation with respect to the direction to whichthe external pressure is applied, a method of using an average valueamong the calculation results of the pressure values detected by 100pressure sensors S_(i), or a method of using a maximum value (forexample, the detection value which is greater than a predeterminedthreshold value) of the pressure values detected by 100 pressure sensorsS_(i) can be used.

According to the detection device 2 of the second embodiment, since theplurality of pressure sensors 112 is disposed in at least 4 rows inlength×4 columns in width in two directions which are perpendicular toeach other, the number of the pressure sensors 112 disposed isincreased. Thereby, the detection result of each pressure sensor 112 isintegrated based on the pressure values detected by the plurality ofpressure sensors 112, and it is possible to obtain the direction andintensity in which the external pressure is applied.

Third Embodiment

FIG. 12 is a cross-sectional view corresponding to FIG. 9A showing aschematic configuration of a detection device according to a thirdembodiment of the invention. In addition, only one elastic protrusion 21is shown in FIG. 9A, but two adjacent elastic protrusions 22 are shownin FIG. 12. The detection device 3 of the third embodiment is differentfrom the detection device 2 of the above-described second embodiment inthat the elastic protrusion 22 is disposed making contact with the firstsubstrate main body 111. In FIG. 12, the same reference numbers aredenoted with respect to the same components as FIG. 9, and the detaileddescription thereof is omitted.

According to the third embodiment, since the elastic protrusion 22 makescontact with the first substrate main body 111 and is disposed, even inthe state where the sliding force is applied to the second substrate 30,the horizontal position of the contact surface of the elastic protrusion22 which comes into contact with the first substrate 110, is not easilydeviated. Therefore, after the center of gravity G of the elasticprotrusion 22 to which the sliding force is applied and the referenceposition P are deviated from each other, even in the state where thesliding force is not applied, it is possible to obtain effects such asdecreasing a residual of the deviation between the center of gravity Gof the elastic protrusion 22 and the reference position, or preventingthe deviation from remaining.

Fourth Embodiment

FIG. 13 is a cross-sectional view which corresponds to FIG. 12 and showsa detection device according to a fourth embodiment of the invention.

The detection 4 of the fourth embodiment is different from the detectiondevice 3 of the above-described third embodiment in that adjacentelastic protrusions 23 are integrally formed. In FIG. 13, the samereference numbers are denoted with respect to the same components asFIG. 12, and the detailed description thereof is omitted.

According to the fourth embodiment, since the adjacent elasticprotrusions 23 are integrally formed, a contact area of the elasticprotrusions 23 with respect to the first substrate 110 is increased,even in the state where the sliding force is applied to the secondsubstrate 30, the horizontal position of the contact surface of theelastic protrusions 23 which come into contact with the first substrate110, is not easily deviated. Therefore, after the center of gravity G ofthe elastic protrusion 23 to which the sliding force is applied and thereference position are deviated from each other, even in the state wherethe sliding force is not applied, it is possible to obtain effects suchas decreasing a residual of the deviation between the center of gravityG of the elastic protrusion 23 and the reference position, or preventingthe deviation from remaining. In addition, it is possible to integrallymold the elastic protrusions 23 and obtain effects such as easilyperforming the manufacture.

Fifth Embodiment

Electronic Apparatus

FIG. 14 is a schematic view showing a schematic configuration of acellular phone 1000 as an electronic apparatus to which at least one ofthe detection devices 1 to 4 according to the embodiments is applied.The cellular phone 1000 as the electronic apparatus of the fifthembodiment includes a plurality of operation buttons 1003, a control pad1002, and a liquid crystal panel 1001 as a display portion. A screenwhich is displayed on the liquid crystal panel 1001 is scrolled due tothe fact that the control pad 1002 is operated. A menu button (notshown) is displayed on the liquid crystal panel 1001. For example, dueto the fact that a cursor (not shown) matches the menu button and thecontrol pad 1002 is pressed strongly, a phone book or a telephone numberis displayed on the cellular phone 1000.

FIG. 15 is a schematic view showing a schematic configuration of apersonal digital assistant 2000 to which at least one of the detectiondevices 1 to 4 according to the embodiments is applied. The personaldigital assistant 2000 includes a plurality of operation buttons 2002, acontrol pad 2003, and a liquid crystal panel 2001 as a display portion.When the control pad 2003 is operated, a menu displayed on the crystalpanel 2001 can be operated. For example, due to the fact that a cursor(not shown) is matched to a menu (not shown) and the control pad 2003 ispressed strongly, an address book or a diary is displayed.

According to the electronic apparatus, since the control pads 1002 and2003 are provided with at least one of the above-described detectiondevices 1 to 4, it is possible to provide the electronic apparatuscapable of detecting the direction and the intensity of the externalpressure with high accuracy.

In addition, other than the above-described electronic apparatus, theelectronic apparatus may include a personal computer, a video cameramonitor, a car navigation device, a pager, an electronic diary, anelectronic calculator, a word-processor, a work station, a video phone,a POS terminal, a digital still camera, a touch panel, or the like. Atleast one of the detection devices 1 to 4 according to the invention canalso be applied to the electronic apparatus.

Sixth Embodiment

Robot

FIGS. 16A and 16B are schematic views showing a schematic configurationof a robot hand 3000 to which at least one of the detection devices 1 to4 according to the embodiments is applied. As shown in FIG. 16A, a robothand 3000 of the sixth embodiment includes a main body 3003, a pair ofarm portions 3002, and a grasping portion 3001 to which at least one ofthe detection devices 1 to 4 is applied. For example, when a drivingsignal is sent to the arm portion 3002 by a control device such as aremote controller, a pair of arm portions 3002 is operated so as to beopened and closed.

As shown in FIG. 16B, a state where an object 3010 such as a cup isgrasped by the robot hand 3000 is considered. At this time, the forcewhich is applied to the object 3010 is detected as a pressure throughthe grasping portion 3001. Since the robot hand 3000 includes at leastone of the above-described detection devices 1 to 4 as the graspingportion 3001, it is possible to detect a force in a vertical directionat a surface (a contact surface) of the object 3010 and a force (acomponent of a sliding force) in a sliding direction by gravity Mg. Forexample, in order to deform a soft body or not to drop a slippery body,it is possible to hold the object while increasing or decreasing theforce according to the texture of the object 3010.

According to the robot, since the robot includes at least one of theabove-described detection devices 1 to 4, it is possible to provide arobot capable of detecting the direction and the intensity of theexternal pressure with high accuracy.

What is claimed is:
 1. A detection device comprising: a first substratethat includes a plurality of pressure sensors that are disposed around areference point; an elastic protrusion that is positioned so that thecenter of gravity of the elastic protrusion is disposed in a positionwhich is overlapped with the reference point, and is elasticallydeformed by an external force; a second substrate that is separated fromthe elastic protrusion and installed on a side which is opposite to thefirst substrate; and a calculation device that calculates a differencebetween pressure values detected by the plurality of pressure sensorsdue to the elastic deformation of the elastic protrusion by the externalforce, wherein the elastic protrusion is formed on the first substrateso that a tip portion of the elastic protrusion makes contact with thesecond substrate, and a direction and an intensity of the externalforce, which is applied from a side of the second substrate, aredetected in a state where the tip portion of the elastic protrusionmakes contact with the second substrate, and the calculation devicecalculates the direction and the intensity of the applied external forcebased on the difference.
 2. The detection device according to claim 1,further comprising a calculation device, wherein the calculation devicecalculates a difference between pressure values detected by a pluralityof pressure sensors which are arbitrarily combined, among pressurevalues which are detected by the plurality of pressure sensors due to afact that the elastic protrusion is elastically deformed by the externalforce, and calculates the direction and the intensity of the appliedexternal force based on the difference.
 3. The detection deviceaccording to claim 1, wherein the elastic protrusion is formed of aresin material having a predetermined hardness, and is hemispherical. 4.The detection device according to claim 1, wherein the plurality ofpressure sensors is disposed to be point symmetrical with respect to thereference point.
 5. The detection device according to claim 4, whereinthe plurality of pressure sensors is disposed in two directions whichcross each other.
 6. The detection device according to claim 5, whereinthe plurality of pressure sensors is disposed in at least 4 rows×4columns in two directions which cross each other.
 7. The detectiondevice according to claim 1, wherein a plurality of the elasticprotrusions is formed in the first substrate, the plurality of elasticprotrusions is disposed separated from each other, and the secondsubstrate is disposed over the plurality of elastic protrusions.
 8. Thedetection device according to claim 1, wherein a stiffness of the secondsubstrate is greater than that of the elastic protrusion.
 9. Anelectronic apparatus comprising the detection device according toclaim
 1. 10. A robot comprising the detection device according to claim1.